プラズマとは プラズマとは プラズマとは
プラズマとは プラズマとは
Diamond-Like Carbon (DLC) Polycrystalline Silicon Carbide
Since it is possible to achieve extremely hard and smooth surfaces through the application of coatings to materials, it is also possible to reduce the frictional force that results from contact between materials. The coatings, therefore, are usable in the abrasion, wear and corrosion resistance of machine parts.

 
 Left:SEM photo of a DLC film,Right:cross-section
(n-dodecane,100hPa,Plasma generation time 3 mins)

Compared to silicon, the material which is currently employed in the fabrication of the majority of semi-conductors, silicon carbide, is capable of maintaining stable properties in far more severe environments. As a result of this, there are great expectations for it as the essential component of the next generation of semi-conductors.

  
 
  SEM photo of an SiCfilm
Silicon Oil,25hPa,Plasma generationtime 1mins)