プラズマとは プラズマとは プラズマとは
プラズマとは
The energy source used was microwaves, high frequency wave(HF) or Radio frequency wave(RF). No particularly large devices were required in the plasma generation, and the plasma was generated at room temperature and normal atmospheric pressure.

  in-liquid plasma CVD device


HF plasma in water device

Reactor capable of continuous processing

General-purpose reactor using microwave oven